仪器对比
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Specifications
| Resolution HV mode | 3.0 nm (30 kV) 15.0 nm (1.0 kV) |
|---|---|
| Resolution LV mode | 4.0 nm (30 kV BED) |
| Magnification | ×5 to ×300,000 |
| Preset magnifications | 6 levels (Can be set by the user) |
| Electron gun | Fully automatic/Manual adjustment available |
| Filament | Factory pre-centered tungsten hairpin filament |
| Accelerating voltage | 0.3 kV to 30 kV |
| Probe current | 1 pA to 1 μA |
| Low vacuum pressure setting range*1 | 10 to 650 Pa |
| Condenser lens | High precision zoom condenser lens |
| Objective lens | Conical lens |
| Objective-lens aperture | 3-step selectable with click-stops Fine position adjustment in X and Y possible. |
| Astigmatism memory | Available |
| Image shift | ±50 μm (WD 10 mm) |
| Automatic function | Focus Brightness/Contrast, astigmatism correction |
| Specimen exchange | Changed by opening the specimen chamber door |
| Maximum specimen | Diameter: 200 mm Height: 80 mm (WD10 mm) |
| Specimen stage | Eucentric goniometer stage (5 axes motor drive stage) X:125 mm Y:100 mm Z:80 mm Tilt: -10 to 90° Rotation: 360° |
| Recipe | Available |
| Image mode | Secondary electron image, REF image, Composition image, Topographic image, Shadow image |
| Comparison window (Snap shot) | 6 shots (Save, load, imaging condition can be reproduced) |
| OS | Windows®7 |
| Monitor | 23-inch touch panel (Display resolution 1,920 × 1,080) |
| Number of pixels | 640 × 480 1,280 × 960 2,560 × 1,920 5,120 × 3,840 |
| Image display mode | Multi view, Full screen view, Flexible view, Add Signals |
| Look up table | Available (Gamma correction, pseudo-color) |
| Histogram display | Available |
| Measurement function | Available (Distance between 2 points, distance between parallel lines, diameter, etc.) |
| 3D measurement | Available*2 |
| Anaglyph image | Available |
| Report creation software | Built in |
| Language configuration | Available on UI (Japanese/English) |
| Image format | BMP,TIFF,JPEG |
| Image auto save | Available |
| Evacuation system | Fully automatic system TMP: 1 RP: 1 or 2 *1 |
| Switching vacuum mode | Available on UI (HV/LV) |
30天
1年
安装调试现场免费培训
到货后14天内
12小时内
是
7天内
是
30天
3月
否
否
否
否
是
是
先付款后维修
维修手册
不支持
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