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主要参数 SENSOR PERFORMANCE | |
介质要求 Applicable media | 洁净干燥无气体 Clean, dry gases |
气体种类 Gas type | 98+气体可选 Available for 98 types of gas |
量程 Full scale（N2 equivalent） | 0-5, 10, 20, 50, 100, 300, 500 sccm；0-1, 2, 5, 10, 20, 30, 50 slpm |
测量范围Measurement range | 0.5%-100% F.S. |
准确度 Accuracy | ±0.5% F.S. |
重复精度Repeatability | ±0.2% F.S. |
线性度Linearity | ±0.2% F.S. |
分辨率 Resolution ratio | 0.001 sccm (<10L/min), 1sccm(10-50L/min) |
传感器响应时间 Sensor response time | <1s |
预热时间 Warm-up time | 5 min (T95), 30分钟最佳 30min for optimum accuracy |
泄露率 Leak integrity | 1*10-8 Pa·m3/sec He |
机械特性 MECHANICAL | |
最大工作压力 Maximum pressure | 3 MPa (30bar） |
工作温度范围Operating temperature range | -20 ~ 65℃ (环境和气体 ambient and gas) |
湿度范围 Relative humidity range | 0 - 98% 无凝露 No-condensing |
气路接头类型Process connections | 快插、快拧、卡套、 VCR （可选） (Push-in fitting, Push-on fitting, Compression fitting, VCR optional) |
气体接触材质Wetted Materials | 氟橡胶、316不锈钢 (FKM, 300-series Stainless steel) |
密封材质 Seals | 氟橡胶 FKM |
防护等级 Ingress protection (housing) | IP40 |
安装方式 Mounting | 水平安装方向校准 Calibrated in horizontal mounting orientation |
固定孔 Mounting holes |
|
重量 Weight | 0.82 kg |
电气和通讯 COMMUNICATIONS | |
电气连接接口类型Electrical connection | DB – 9公头 (Male) |
模拟信号 Analog input and output options | 0 – 5 VDC, 4 – 20 mA （可定制） |
输入输出阻抗 Impedance resistance | 输入阻抗>10MΩ,输出阻抗<1KΩ |
模拟数据更新频率Analog data update rate | 200Hz |
数字信号 Digital input and output options | Modbu RTU (RS232, RS485), CAN (CAN) |
通信速率 Digital data update rate | 9600(default), 14400, 19200, 38400, 56000, 57600, 115200 bps（可修改） |
电源 Power requirements | 15 – 40 VDC, <200 mA |
显示更新频率Display update rate | 50Hz |
模拟信号精度 Analog signal accuracy | ± 0.05%F.S. |
特征 FEATURES | |
标况 STP reference conditions | 20℃ and 1 atm |
气体选择Gas Select | 98种气体可选，具体参考说明书气体系数 98 user selectable gases stored internally, refer to the Gas Correction Factors |
软件Software | Aitoly 分阶流量软件 |
尺寸 DIMENSIONS | Weight | ||||||||
Full scale flow | Height | Width | Depth | A | B | C | D | E | 重 量 |
5 sccm~50 slpm | 125.00 mm | 76.00 mm | 32.00 mm | 64.00 mm | 17.80 mm | 7.00 mm | 6.00 mm |
| ≈0.82 kg |
4.921 in | 2.992 in | 1.260 in | 2.520 in | 0.701 in | 0.276 in | 0.236 in |
| ≈2.1 lb | |
100slpm-500slpm | 138mm | 82mm | 38mm | 62mm | 30mm | 4mm | 10mm |
| 1kg |
5.43in | 3.22in | 1.496in | 2.440in | 1.181in | 0.157in | 0.393in |
| 2.21lb | |
M4 8mm
M4 0.31in
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