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This 5-Axis Device Platform is designed to be used in
conjunction with the NanoMax™ 600 six-axis
waveguide manipulator. It is well suited for
applications that require an optical element or
assembly to be held at a fixed position in front of a
high performance multi-axis alignment system. The
five degrees of freedom that this device offers allows
the fixed portion of the optical assembly to be
positioned such that it has the proper orientation
with respect to another positioning stage. The
photograph below shows the NBM513, five-axis
Device Platform, mounted next to our high
performance NanoMax™ 300 (MAX313), which is
uniquely qualified in its ability to perform complex
optical alignment routines at the nanometer level.
(see page 286 for details).
The NBM513, 5-Axis Device Platform has flexure
hinges for all the rotational degrees of freedom; both
the x and y linear axes utilize traditional bearing
stages to provide for longer travel. The top deck of
the NBM513 is located 112.5mm above the bottom
mounting surface of the device and is designed to
accept any of the accessories that are featured on
pages 319-335.
技术参数：
Specifications
■ Travel:
• Coarse Travel:
– Optical Axis (x)
13mm (0.5")
– Horizontal Axis (y)
13mm (0.5")
– Vertical Axis (z) 6mm
– Pitch Axis (θy) 8°
– Yaw Axis (θz) 8°
• Fine Travel:
– Optical Axis 300μm
– Horizontal Axis 300μm
– Vertical Axis 300μm
– Pitch Axis 30arcmin
– Yaw Axis 10arcmin
Resolution:
• Coarse Travel:
– Optical Axis 1μm
– Vertical Axis 1μm
– Horizontal Axis 1μm
– Pitch Axis 40arcsec
– Yaw Axis 20arcsec
• Fine Travel:
– Optical Axis 50nm
– Vertical Axis 50nm
– Horizontal Axis 50nm
– Pitch Axis 2arcsec
– Yaw Axis 1arcsec
Deck Height: 112.5mm
to the Mounting Surface
of the Moving Platform,
Accessory Beam Height is
125mm Measured From
the Bottom Surface of
the Stage
Load Capacity: 500g
(1.1lbs)
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