Sub-10nm-EDS-analysis-in-the-SEM

2020/06/15   下载量： 1 次

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应用领域 电子/电气
检测样本 其他
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参考标准 无

Testing EDS spatial resolution using a tin sphere on carbon imaging standard Using 2 kV at 5 mm WD, a spectrum image (6,500 cps, 15 minutes) was collected from an area of the standard where the smallest spheres were concentrated. The X-ray data were reconstructed into a ‘layered map’ combining the Sn M (400 eV) and O K signals from the Sn spheres (Fig. 1). Inspection of the image shows that spheres down to 10 nm in diameter are clearly differentiated. Smaller spheres, which were measured at 7.5 nm, can also be distinguished in the image.

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Testing EDS spatial resolution using a tin sphere on carbon

imaging standard

Using 2 kV at 5 mm WD, a spectrum image (6,500 cps, 15 minutes) was collected from an area of the standard where the

smallest spheres were concentrated. The X-ray data were reconstructed into a ‘layered map’ combining the Sn M (400 eV) and

O K signals from the Sn spheres (Fig. 1). Inspection of the image shows that spheres down to 10 nm in diameter are clearly

differentiated. Smaller spheres, which were measured at 7.5 nm, can also be distinguished in the image.


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牛津仪器科技（上海）有限公司
白金会员 丨 第23年
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