Analysing a NAND Flash memory device using low kV EDS

2020/06/15   下载量: 1

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应用领域 电子/电气
检测样本 其他
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Introduction Historically energy dispersive X-ray spectroscopy has been focused towards high energies where X-ray lines are well separated and the X-ray background is low. Recently the demand for higher spatial resolution, whether that is when analysing semiconductor devices or measuring precipitates in metals, has increased dramatically. To ensure maximum sensitivity when working under these demanding conditions the Ultim® range of EDS detectors combine the largest area SDD with optimised geometries to consistently deliver a higher count rate.

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Introduction

Historically energy dispersive X-ray spectroscopy has been focused towards high energies where X-ray lines are well separated

and the X-ray background is low. Recently the demand for higher spatial resolution, whether that is when analysing

semiconductor devices or measuring precipitates in metals, has increased dramatically. To ensure maximum sensitivity when

working under these demanding conditions the Ultim® range of EDS detectors combine the largest area SDD with optimised

geometries to consistently deliver a higher count rate.


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