Günther Benstetter received the doctorate degree in electrical engineering from Technical University of Munich, Germany, in 1994. He joined Siemens AG in Munich and the IBM/Siemens/Toshiba DRAM development project in Essex Junction, VT, USA, in 1995. Dr. Benstetter was appointed Professor at the Deggendorf Institute of Technology in Deggendorf, Germany, in 1998 and is head of the Institute of Quality and Materials Analysis. His research interests are in the fields of thin films, electronic materials and reliability and failure analysis of semiconductor devices. He has contributed to more than 80 publications and has co-organized several international conferences.