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Invited talk: Recent Trends in Characterization of Nanoelectronic Materials and Devices with Scanning Probe Microscopy<br>特邀报告：使用扫描探针显微镜表征纳米电子材料和器件的最新趋势

The presentation discusses recent applications of established Scanning Probe Microscopy (SPM) methods and new developments for the characterization of nanoelectronic materials and devices. The contribution includes various methods of Conductive Atomic Force Microscopy (C-AFM) as well as Scanning Capacitance Microscopy (SCM) based techniques, Kelvin Probe Force Microscopy (KPFM) and Scanning Thermal Microscopy (SThM). Case studies for the characterization of different materials and systems and related measurement artifacts are presented. Finally, the presentation discusses combined methods, extending the field of application of selected SPM-based characterization techniques.

265 2020-12-30

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