QuanX型荧光能谱仪晶园上薄膜纳米级薄膜厚度均匀度测量

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January 12, 2001 Mr. Jesse Huang, 9999 Hamilton Blvd Breinigsville, PA 18031 Dear Mr. Huang: We have analyzed the two wafers that you submitted late last month. The analysis was fairly routine, and our QuanX EDXRF system easily achieved the required precision. The report below details how the data were acquired and analyzed. Layer thickness at nine points on each wafer and precision measurements are also reported. I hope you will find these results helpful and indicative of the ability of the QuanX system to meet your needs and exceed your expectations. If I may be of additional assistance, please contact me directly in the Redwood City office at 650.562.2538. Sincerely, Anton Kleyn, Applications Engineer 硅晶园片上Ti/Au/Cr层厚度的测量 Thermo NORAN 简介: Thermo NORAN荧光能谱仪试验室分析了两个硅晶圆片上镀层的厚度， 一个是Si上的Ti, 另外一个是 Si上的 Ti/Au/Cr. 分析方法是基本参数薄膜分析方法. 仪器: QuanX PCD 系统, 美国热电集团. 样品制备: 不需要样品制备，直接分析。要注意样品放置时的方向和角度 采谱条件： 电压(kV) 电流(mA) 滤光片 样品室气氛 分析元素 17 自动 Aluminum 空气 Cr, Ti 27* 自动 Pd thick 空气 Au 此条件仅用于晶片Cr/Au/Ti 谱处理: 用拟合法XML提取净峰强度 。 分析技术: 使用半无标样基本参数法（FP）  基体校正  使用与样品成分不同的标样  使用纯元素为标样直接对未知样品进行分析 这种方法对那些找不到相应标样的用户是特别有用的。 分析结果 ​Ti Chart 655.8 668.9 663.8 668.9 669.1 668.9 665.3 668.9 664.2 668.9 663.1 668.9 667.8 668.9 669.1 668.9 664 668.9 664.7 668.9 Ti Au Cr Chart 313 140.5 316.305 438.7 442.58 141.19 315.5 141.4 316.305 440 442.58 141.19 316.3 141.2 316.305 439.3 442.58 141.19 314.1 140.5 316.305 437.6 442.58 141.19 314 140.8 316.305 441.6 442.58 141.19 318.9 143 316.305 450.9 442.58 141.19 312.1 141.2 316.305 444.7 442.58 141.19 316.3 141.2 316.305 439.3 442.58 141.19 315.7 141.7 316.305 444.9 442.58 141.19 317 143.8 316.305 446.4 442.58 141.19 Multi-point Analysis TIME: 11:53:06 DATE: 1/11/01 TIME: 14:33:15 DATE: 1/11/01 LIVETIME = 100 s Wafer Analysis Wafer Analysis AU CR TI TI Horizontal 1 313.0 140.5 438.7 Angs 1 655.8 Angs 2 315.5 141.4 440.0 2 663.8 3 316.3 141.2 439.3 3 669.1 4 314.1 140.5 437.6 4 665.3 5 314.0 140.8 441.6 5 664.2 Vertical 6 318.9 143.0 450.9 6 663.1 7 312.1 141.2 444.7 7 667.8 8 316.3 141.2 439.3 8 669.1 9 315.7 141.7 444.9 9 664.0 10 317.0 143.8 446.4 10 664.7 Averages at center Average at center AU CR TI TI 1 316.3 141.2 442.6 Angs 1 668.9 Angs 2 316.3 141.2 442.6 2 668.9 3 316.3 141.2 442.6 3 668.9 4 316.3 141.2 442.6 4 668.9 5 316.3 141.2 442.6 5 668.9 6 316.3 141.2 442.6 6 668.9 7 316.3 141.2 442.6 7 668.9 8 316.3 141.2 442.6 8 668.9 9 316.3 141.2 442.6 9 668.9 10 316.3 141.2 442.6 10 668.9 Ti Au Cr Precision Livetime 600 s (~106 counts per ROI) Livetime 100 s (~105 counts per ROI) Livetime 200 s Meas. Au Cr Ti Meas. Au Cr Ti Meas Ti 1 318.7 146.2 445.6 1 317.0 141.4 440.4 1 664.0 2 319.5 145.8 444.9 2 316.9 140.3 441.1 2 668.9 3 318.8 145.8 446.9 3 314.9 141.3 445.1 3 665.8 4 319.2 146.3 444.9 4 316.9 141.3 443.3 4 667.8 5 318.1 145.6 446.2 5 314.5 141.0 444.9 5 668.7 6 318.8 146.0 445.6 6 318.8 141.9 442.0 6 670.0 7 319.7 146.7 446.0 7 316.6 141.2 442.4 7 669.8 8 318.7 145.8 446.4 8 318.4 140.6 441.3 8 670.7 9 319.0 146.0 445.8 9 316.7 140.5 442.7 9 669.8 10 318.2 146.0 445.3 10 316.0 140.6 444.0 10 668.9 11 318.2 145.9 445.1 11 319.2 141.9 440.7 11 669.3 12 317.3 146.0 442.7 12 313.6 141.9 444.7 12 668.0 13 318.7 145.9 444.9 13 314.8 141.2 442.9 13 670.4 14 319.3 146.2 445.3 14 315.9 141.2 442.0 14 669.8 15 318.8 145.6 445.3 15 315.4 141.6 445.6 15 668.2 16 319.2 146.0 444.9 16 315.7 141.4 441.8 16 668.9 17 318.5 145.9 444.4 17 316.9 140.3 443.1 17 669.8 18 319.2 145.6 445.1 18 314.1 142.1 441.8 18 669.6 19 318.5 145.3 444.7 19 316.8 140.2 440.9 19 670.0 20 318.2 145.9 444.4 20 317.0 141.9 440.9 20 668.9 Average 318.7 145.9 445.2 Angs Average 316.3 141.2 442.6 Average 668.9 Std Dev 0.56 0.30 0.88 Std Dev 1.50 0.60 1.59 Std Dev 1.59 Relative 0.18 0.20 0.20 % Relative 0.47 0.43 0.36 Relative 0.24 Ti Precision TIME: 17:12:2 4 DATE: 1/1 0/2001 Livetime 200 s 1 TI 664.0 angstroms 2 TI 668.9 3 TI 665.8 4 TI 667.8 5 TI 668.7 6 TI 670.0 7 TI 669.8 8 TI 670.7 9 TI 669.8 10 TI 668.9 11 TI 669.3 12 TI 668.0 13 TI 670.4 14 TI 669.8 15 TI 668.2 16 TI 668.9 17 TI 669.8 18 TI 669.6 19 TI 670.0 20 TI 668.9 Average 668.9 Std Dev 1.59 Relative 0.24 ​ ​Ti Chart 655.8 668.9 663.8 668.9 669.1 668.9 665.3 668.9 664.2 668.9 663.1 668.9 667.8 668.9 669.1 668.9 664 668.9 664.7 668.9 Ti Au Cr Chart 313 140.5 316.305 438.7 442.58 141.19 315.5 141.4 316.305 440 442.58 141.19 316.3 141.2 316.305 439.3 442.58 141.19 314.1 140.5 316.305 437.6 442.58 141.19 314 140.8 316.305 441.6 442.58 141.19 318.9 143 316.305 450.9 442.58 141.19 312.1 141.2 316.305 444.7 442.58 141.19 316.3 141.2 316.305 439.3 442.58 141.19 315.7 141.7 316.305 444.9 442.58 141.19 317 143.8 316.305 446.4 442.58 141.19 Multi-point Analysis TIME: 11:53:06 DATE: 1/11/01 TIME: 14:33:15 DATE: 1/11/01 LIVETIME = 100 s Wafer Analysis Wafer Analysis AU CR TI TI Horizontal 1 313.0 140.5 438.7 Angs 1 655.8 Angs 2 315.5 141.4 440.0 2 663.8 3 316.3 141.2 439.3 3 669.1 4 314.1 140.5 437.6 4 665.3 5 314.0 140.8 441.6 5 664.2 Vertical 6 318.9 143.0 450.9 6 663.1 7 312.1 141.2 444.7 7 667.8 8 316.3 141.2 439.3 8 669.1 9 315.7 141.7 444.9 9 664.0 10 317.0 143.8 446.4 10 664.7 Averages at center Average at center AU CR TI TI 1 316.3 141.2 442.6 Angs 1 668.9 Angs 2 316.3 141.2 442.6 2 668.9 3 316.3 141.2 442.6 3 668.9 4 316.3 141.2 442.6 4 668.9 5 316.3 141.2 442.6 5 668.9 6 316.3 141.2 442.6 6 668.9 7 316.3 141.2 442.6 7 668.9 8 316.3 141.2 442.6 8 668.9 9 316.3 141.2 442.6 9 668.9 10 316.3 141.2 442.6 10 668.9 Ti Au Cr Precision Livetime 600 s (~106 counts per ROI) Livetime 100 s (~105 counts per ROI) Livetime 200 s Meas. Au Cr Ti Meas. Au Cr Ti Meas Ti 1 318.7 146.2 445.6 1 317.0 141.4 440.4 1 664.0 2 319.5 145.8 444.9 2 316.9 140.3 441.1 2 668.9 3 318.8 145.8 446.9 3 314.9 141.3 445.1 3 665.8 4 319.2 146.3 444.9 4 316.9 141.3 443.3 4 667.8 5 318.1 145.6 446.2 5 314.5 141.0 444.9 5 668.7 6 318.8 146.0 445.6 6 318.8 141.9 442.0 6 670.0 7 319.7 146.7 446.0 7 316.6 141.2 442.4 7 669.8 8 318.7 145.8 446.4 8 318.4 140.6 441.3 8 670.7 9 319.0 146.0 445.8 9 316.7 140.5 442.7 9 669.8 10 318.2 146.0 445.3 10 316.0 140.6 444.0 10 668.9 11 318.2 145.9 445.1 11 319.2 141.9 440.7 11 669.3 12 317.3 146.0 442.7 12 313.6 141.9 444.7 12 668.0 13 318.7 145.9 444.9 13 314.8 141.2 442.9 13 670.4 14 319.3 146.2 445.3 14 315.9 141.2 442.0 14 669.8 15 318.8 145.6 445.3 15 315.4 141.6 445.6 15 668.2 16 319.2 146.0 444.9 16 315.7 141.4 441.8 16 668.9 17 318.5 145.9 444.4 17 316.9 140.3 443.1 17 669.8 18 319.2 145.6 445.1 18 314.1 142.1 441.8 18 669.6 19 318.5 145.3 444.7 19 316.8 140.2 440.9 19 670.0 20 318.2 145.9 444.4 20 317.0 141.9 440.9 20 668.9 Average 318.7 145.9 445.2 Angs Average 316.3 141.2 442.6 Average 668.9 Std Dev 0.56 0.30 0.88 Std Dev 1.50 0.60 1.59 Std Dev 1.59 Relative 0.18 0.20 0.20 % Relative 0.47 0.43 0.36 Relative 0.24 Ti Precision TIME: 17:12:2 4 DATE: 1/1 0/2001 Livetime 200 s 1 TI 664.0 angstroms 2 TI 668.9 3 TI 665.8 4 TI 667.8 5 TI 668.7 6 TI 670.0 7 TI 669.8 8 TI 670.7 9 TI 669.8 10 TI 668.9 11 TI 669.3 12 TI 668.0 13 TI 670.4 14 TI 669.8 15 TI 668.2 16 TI 668.9 17 TI 669.8 18 TI 669.6 19 TI 670.0 20 TI 668.9 Average 668.9 Std Dev 1.59 Relative 0.24 ​ 测量精密度： Table 1 Ti / Au / Cr / Si Ti / Si Ti Cr Au Ti Acquire Time 100 s 200 s Meas. 1 440.4 141.4 317.0 664.0 2 441.1 140.3 316.9 668.9 3 445.1 141.3 314.9 665.8 4 443.3 141.3 316.9 667.8 5 444.9 141.0 314.5 668.7 6 442.0 141.9 318.8 670.0 7 442.4 141.2 316.6 669.8 8 441.3 140.6 318.4 670.7 9 442.7 140.5 316.7 669.8 10 444.0 140.6 316.0 668.9 11 440.7 141.9 319.2 669.3 12 444.7 141.9 313.6 668.0 13 442.9 141.2 314.8 670.4 14 442.0 141.2 315.9 669.8 15 445.6 141.6 315.4 668.2 16 441.8 141.4 315.7 668.9 17 443.1 140.3 316.9 669.8 18 441.8 142.1 314.1 669.6 19 440.9 140.2 316.8 670.0 20 440.9 141.9 317.0 668.9 平均值 (A) 442.6 141.2 316.3 668.9 标准偏差. 1.59 0.60 1.50 1.59 RSD (%) 0.36 0.43 0.47 0.24 测得的精密度超过了要求至少两倍。若精密度要求不需要这么高，采谱时间可以减少。 例如：将采谱时间由200秒，减少到100秒，硅上 Ti层的测厚精度将为 约 0.5%。 结论： 分析结果表明，本仪器具有高精度的检查，表征层厚及其均匀性的能力。 晶圆片分析 按照右图所示选择 10 点进行分析. 图1和2 是 Cr/Au/Ti 和 Ti 结果. 晶圆片上的测试点