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  • 悬赏金额:15积分状态:已解决
  • 【序号】: 1
    【作者】: Wen-Ching Wei1 and Mo-Hsiung Yang1
    【题名】:Determination of phosphorus and arsenic in trichlorosilane by electrothermal vaporization-inductively coupled plasma mass spectrometry with prior concentration by cuprous chloride
    【期刊】: Fresenius' Journal of Analytical Chemistry
    【年、卷、期、起止页码】: Volume 353, Number 2 / 1995年9月,167-170
    【全文链接】: http://www.springerlink.com/content/0p6ugn5uyay3yjw4/
    【序号】: 2
    【作者】: Wong, C. Amato, A.F. Brzychcy, A.M.
    【题名】: Determination of metals impurity concentrations in semiconductorgases
    【期刊】: Advanced Semiconductor Manufacturing Conference and Workshop. 1994.
    【年、卷、期、起止页码】:14-16 Nov 1994,211-214
    【全文链接】:http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=588250
    【序号】: 3
    【作者】: J. Paul Cali 1
    【题名】:ANALYTICAL METHODS FOR THE CONTROL OF CHEMICAL PURITY
    【期刊】: Annals of the New York Academy of Sciences
    【年、卷、期、起止页码】:Volume 118 Issue Ultrapurification, Pages 639 - 644
    【全文链接】:http://www3.interscience.wiley.com/journal/119758116/abstract?CRETRY=1&SRETRY=0number=588250

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