【序号】1 【作者】P.E.Schmid 【标题】Optical and electronic properties of sputtered TiN thin films【期刊】Journal of Vacuum Science and Technology 【年份】1998 【链接】http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTAD6000016000005002870000001&idtype=cvips&gifs=yes