Abstract Bare and partially hydrogenated neutral silicon clusters, SinHx (n = 3−10, x = 0−3), were produced upon flash pyrolysis of dilute (1%) mixtures of disilane, Si2H6, in Ar and of silane, SiH4, in He at temperatures above 1000 K. Immediately following the flash pyrolysis of the precursors (on an 20 μs time scale), the clusters were isolated in a supersonic molecular beam and detected by single vacuum ultraviolet (VUV) photon (λ = 118.2 or 121.6 nm) ionization time-of-flight mass spectrometry (TOFMS). The clusters produced were similar for both precursors with SinHx (n = 4, 6, 7, 10) being significantly populated and Si6Hx being the most abundant, consistent with the known “magic numbers” of Si clusters. Hydrogen contents in these SinHx clusters were small with typical hydrogen mole fractions near 10%. The most stable structures of the Si6H and Si6H2 clusters were identified using ab initio quantum mechanical methods. Initial thermal decomposition intermediates and reaction products, such as SiH2, Si2H4, Si2H2, trisilanes, and tetrasilanes, were also observed by TOFMS.
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