【序号】:1 【作者】:Yasuhiro Mizutani and Tetsuo Iwata 【题名】:Thin Film Thickness Measurement by Surface Plasmon Resonance Using a Modified Otto’s Configuration Combined with Ellipsometry 【期刊】:International Journal of Automation Technology 【年、卷、期、起止页码】:2011, Vol.5, No.2 ,pp. 236-240, 2011