【序号】：1 【作者】：Siemers, M.; Pflug, A.; Melzig, T.; Gehrke, K.; Weimar, A.; Szyszka, B. 【题名】：Model based investigation of Ar+ ion damage in DC magnetron sputtering 【期刊】：Surface and Coatings Technology 【年、卷、期、起止页码】：Volume 241, 25 February 2014, Pages 50–53 【全文链接】：http://www.sciencedirect.com/science/article/pii/S0257897213008748
【序号】：2 【作者】：Melzig, T.; Siemers, M.; Pflug, A.; Rank, R. 【题名】：3D PIC-MC simulation of anode effects in dual magnetron discharges 【期刊】：Surface and Coatings Technology 【年、卷、期、起止页码】：Volume 241, 25 February 2014, Pages 30–32 【全文链接】：http://www.sciencedirect.com/science/article/pii/S0257897213009584
【序号】：3 【作者】：A Pflug; M Siemers; C Schwanke; B Febty Kurnia; V Sittinger; B Szyszka 【题名】：Simulation of plasma potential and ion energies in magnetron sputtering 【期刊】：Materials Technology 【年、卷、期、起止页码】：Volume 26 Issue 1 (01 February 2011), pp. 10-14 【全文链接】：http://www.maneyonline.com/doi/abs/10.1179/175355511X12941605982028?journalCode=mte
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