XRD
第1楼2006/12/14
JADE: PDF Overlay List
DATE: Thursday, Dec 14, 2006 10:27p
FILE: [1.txt]
SCAN: 10.0/90.0018/0.02/1(sec), Cu, I(max)=6501, 12-14-06 22:15
Phase ID (5 Overlays) Chemical Formula File ID I% 2T(0) d/d(0) RIR Wt% Tag XS(A) #d/I
[x] Titanium Nitride TiN PDF#65-0715 98.0 0.120 1.0000 4.07 0.0 Major >1000 10
[x] Titanium Ti PDF#65-6231 13.0 0.120 1.0000 6.44 0.0 Minor >1000 22
[x] Molybdenum Niobium MoNb PDF#65-5786 3.0 0.000 1.0000 19.50 0.0 Minor >1000 8
[x] Chromium Titanium CrTi4 PDF#65-6818 3.0 -0.120 1.0000 9.83 0.0 Minor >1000 8
[x] Cobalt - $-alpha Co PDF#88-2325 2.0 -0.060 1.0000 7.14 0.0 Trace >1000 3
上面是对其中一个样品的分析结果,对于后面三种物相,要看你使用的是什么靶沉积的,是否环境干净?