椭圆偏振光谱仪的标准应用

2014-06-09 13:25  下载量：14

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Ellipsometry is a very versatile optical technique that has applications in many different fields, from the micro electronics and semiconductor industries (for characterizing oxides or photoresists on silicon wafers, for ex ample) to biology. This very sensitive measurement technique provides unequalled capabilities for thin film metrology, and has the advantage that it is non-destructive as it uses polarized light to probe the dielectr properties of a sample.

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HORIBA（中国）
白金会员 | 第22年
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