薄膜材料null检测 | 使用MM-16椭圆偏振光谱仪表征TiO2薄膜和多层减反膜-HORIBA（中国）

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应用领域	材料
检测样本	薄膜材料
检测项目
参考标准	0

Owing to the sensitivity of the MM-16 Spectroscopic Ellipsometer and the advanced modeling features included in the DP2 software, this note describes the successful characterisation of complicated anti-reflective structures. Accurate and simultaneous determination of thickness and optical properties have been performed in the visible range. Similar analyses have been applied to other high-k material such as Ta2O5 / glass, Al2O3 / 3*{A2O3/a-Si} / GaAs, SiO2 / 2*{HfO2 / SiO2) / glass.

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HORIBA UVISEL Plus研究级经典型椭偏仪
型号：UVISEL

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方案详情

Owing to the sensitivity of the MM-16 Spectroscopic Ellipsometer and the advanced modeling features included in the DP2 software, this note describes the successful characterisation of complicated anti-reflective structures. Accurate and simultaneous determination of thickness and optical properties have been performed in the visible range. Similar analyses have been applied to other high-k material such as Ta2O5 / glass, Al₂O₃ / 3*{A₂O₃/a-Si} / GaAs, SiO₂ / 2*{HfO₂ / SiO₂) / glass.

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HORIBA（中国）

白金会员丨第22年

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