3D surface Profi ling applications

2008/10/17   下载量: 152

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Stylus-based surface profiling is a standard technique for accurate, repeatable surface shape, topography and step height measurement in applications ranging from semiconductor R&D to solar cell QC. In recent years, the ability to map surfaces in 3D has greatly increased the capability of stylus profilers; yet despite such recent advancements, it is not uncommon in cutting-edge fabs, solar cell companies, industrial manufacturing facilities, colleges, universities and various research institutes to see R&D, QC and process monitoring operations performed still using technologies developed over sixty years ago.

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