MCL三轴纳米位移台M350

报价：面议

型号：	Nano-M350
产地：	美国
品牌：	MCL关注纳米
评分：

核心参数

产品种类：电动位移台

产品详情

简介

The Nano-M350 is a compact, three-axis nanopositioning system offering 50 μm x 50 μm x 25 μm motion ranges with picometer accuracy under closed loop control. Constructed from aluminum and titanium or invar for superior thermal stability, it suits applications like alignment, MEMS, nanolithography, and SEM. Available in high vacuum-compatible models, it features internal position sensors using proprietary PicoQ® technology.

Features

Compact size
Three axis motion (XYZ)
50 μm x 50 μm x 25 μm ranges of motion
Center aperture: 0.25"
Closed loop control

Typical Applications

Alignment
MEMS
Nanolithography
SEM

Product Description

The Nano-M350 is a compact three axis (X, Y, Z) nanopositioning system constructed from aluminum combined with titanium or constructed completely from invar for the highest degree of thermal stability. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 is also available in high vacuum (non-bakeable) compatible models.

Technical Specifications
Range of motion (X)	50 μm
Range of motion (Y)	50 μm
Range of motion (Z)	25 μm
Resolution (25/50 μm)	0.05/0.1 nm
Resonant Frequency (X)	1 kHz ±20%
Resonant Frequency (Y)	700 Hz ±20%
Resonant Frequency (Z)	700 Hz ±20%
Stiffness	1.0 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al and Titanium, or Invar
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.