MCL 提示/倾斜、旋转纳米位移台Align3 系列

报价：面议

型号：	Nano-Align3 Series
产地：	美国
品牌：	MCL关注纳米
评分：

核心参数

产品种类：电动位移台

产品详情

简介

Nano-Align3是一款低轮廓（0.8英寸）三轴纳米定位系统，提供100 μm或200 μm的Z轴行程和2mradians或4mradians的θXθY角度调整，适用于纳米级对准和精密测量应用。其大中心孔径（2.6"x2.6"）和闭环控制使该设备在显微镜对准等应用中表现出色。采用PicoQ®技术实现皮米和纳弧度精度。可根据需求选择不同型号以满足特定的行程范围和负载要求。

Features

Low profile: 0.8"
Three axis motion (Z θ_X θ_Y)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θ_Xθ_Y)
Closed loop control

Typical Applications

Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS

Z tip tilt piezo stage

Product Description

The Nano-Align3 is a three axis (Z, θ_X , θ_Y) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ^® technology provide picometer and nanoradian precision under closed loop control.

Technical Specifications
Ranges of motion (Nano-Align3-100)
Z axis	100 μm
θ_X and θ_Y	2 mradian
Ranges of motion (Nano-Align3-200)
Z axis	200 μm
θ_X and θ_Y	4 mradian
Resolution (Nano-Align3-100)	0.2nm/ 4 nradian
Resolution (Nano-Align3-200)	0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100)	600 Hz ±20%
Resonant Frequency (Nano-Align3-200)	450 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum, Titanium, or Invar
Controller	Nano-Drive^®/Nano-Drive^®85
* Larger load requirements should be discussed with our engineering staff.