MCL 提示/倾斜、旋转纳米位移台Align5 系列
MCL 提示/倾斜、旋转纳米位移台Align5 系列

MCL 提示/倾斜、旋转纳米位移台Align5 系列

参考价：面议
型号： Nano-Align5 Series
产地： 美国
品牌： MCL关注纳米
评分：
核心参数
北京欧兰科技发展有限公司
金牌会员 丨 17年
关注展位 全部仪器
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产品详情


Features

  • Low profile

  • Five axis motion (XYZ θX θY)

  • 100 μm, 200 μm, or 300 μm motion in XYZ

  • Up to 3.3mrad motion in θX , and up to 4.5 mrad motion in θY

  • Center aperture: 2.6" x 2.6"

  • Closed loop control



Typical Applications

  • Alignment

  • MEMS

  • Nanolithography

  • Metrology


XYZ tip tilt nanopositioning systemfive axis tip tilt piezo stage with manual micrometer stage

Product Description

The Nano-Align5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θXθY). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ®technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning.



Technical Specifications

Ranges of motion (Nano-Align5-100)100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY)
Ranges of motion (Nano-Align5-200)200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY)
Ranges of motion (Nano-Align5-300)300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY)
Resolution (Nano-Align5-100)
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY)
Resolution (Nano-Align5-200)0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY)
Resolution (Nano-Align5-300)0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY)
Resonant Frequencies
X axis (100/200/300 μm)450/400/350 Hz ±20%
Y axis (100/200/300 μm)350/300/250 Hz ±20%
Z axis (100/200/300 μm)450/350/250 Hz ±20%
Stiffness1.0 N/μm
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAluminum (all models), Invar or Titanium (100 or 200μm only)
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.



Additional Information

Nano-Align5 Series Drawing
drawing of five axis xyz tip tilt nanopositioner		Nano-Align5 Series Catalog Pages
catalog page for five axis xyz tip tilt nanopositioning system



Related Products

  • Nano-Align3 Series

  • Nano-Align6 Series

  • Nano-Man5

  • Nano-M3Z

  • Manual MicroStage Series

  • MicroStage Series

  • Accessories

  • Nano-Drive®


北京欧兰科技发展有限公司为您提供MCL关注纳米MCL 提示/倾斜、旋转纳米位移台Align5 系列Nano-Align5 Series，MCL关注纳米Nano-Align5 Series产地为美国，属于位移台，除了MCL 提示/倾斜、旋转纳米位移台Align5 系列的参数、价格、型号、原理等信息外，还可为您提供更多位移台,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。

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北京欧兰科技发展有限公司为您提供MCL关注纳米MCL 提示/倾斜、旋转纳米位移台Align5 系列Nano-Align5 Series，MCL关注纳米Nano-Align5 Series产地为美国，属于位移台，除了MCL 提示/倾斜、旋转纳米位移台Align5 系列的参数、价格、型号、原理等信息外，还可为您提供更多位移台,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。
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