MCL提示/倾斜、旋转纳米位移台M3Z
MCL提示/倾斜、旋转纳米位移台M3Z

MCL提示/倾斜、旋转纳米位移台M3Z

参考价：面议
型号： Nano-M3Z
产地： 美国
品牌： MCL关注纳米
评分：
核心参数
北京欧兰科技发展有限公司
金牌会员 丨 17年
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Features

  • Compact design

  • Three axis motion (Z θX θY)

  • Low profile: 0.8"

  • Center aperture: 0.25” diameter

  • Closed loop control



Typical Applications

  • Z-axis plus tip/tilt alignment

  • Nanolithography

  • Metrology

  • Nano-alignment



Product Description

The Nano-M3Z is a compact, three axis (Z, θX , θY) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z.



Technical Specifications

Range of motion (Z)

25 μm

Range of motion (θX)
1 mradian
Range of motion (θY)1 mradian
Resolution (Z)0.05 nm
Resolution (θX)2 nradian
Resolution (θY)2 nradian
Resonant Frequency700 Hz ±20%
Stiffness1.0 N/μm
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAluminum or Invar
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.



Additional Information

Nano-M3Z Drawing

Nano-M3Z Catalog Pages



Related Products

  • Nano-M250

  • Nano-M350

  • Nano-Man5

  • Nano-MZ

  • Nano-Align3 Series

  • Accessories

  • Nano-Drive®


北京欧兰科技发展有限公司为您提供MCL关注纳米MCL提示/倾斜、旋转纳米位移台M3ZNano-M3Z，MCL关注纳米Nano-M3Z产地为美国，属于位移台，除了MCL提示/倾斜、旋转纳米位移台M3Z的参数、价格、型号、原理等信息外，还可为您提供更多位移台,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。

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北京欧兰科技发展有限公司为您提供MCL关注纳米MCL提示/倾斜、旋转纳米位移台M3ZNano-M3Z，MCL关注纳米Nano-M3Z产地为美国，属于位移台，除了MCL提示/倾斜、旋转纳米位移台M3Z的参数、价格、型号、原理等信息外，还可为您提供更多位移台,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。
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