MCL提示/倾斜、旋转纳米位移台Man5
MCL提示/倾斜、旋转纳米位移台Man5

MCL提示/倾斜、旋转纳米位移台Man5

参考价：面议
型号： Nano-Man5
产地： 美国
品牌： MCL关注纳米
评分：
核心参数
北京欧兰科技发展有限公司
金牌会员 丨 17年
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Features

  • Compact size

  • Five axis motion (XYZ θX θY)

  • 50 μm x 50 μm x 25 μm x 1mrad x 1mrad

  • ranges of motion

  • Center aperture: 0.25"

  • Closed loop control



Typical Applications

  • Alignment

  • MEMS

  • Nanolithography

  • SEM




Product Description

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.



Technical Specifications

Range of motion (X)50 μm
Range of motion (Y)
50 μm
Range of motion (Z)25 μm
Range of motion (θX)1 mradian
Range of motion (θY)1 mradian
Resolution (X)0.1 nm
Resolution (Y)0.1 nm
Resolution (Z)0.05 nm
Resolution (θX)2 nradian
Resolution (θY)2 nradian
Resonant Frequency (X)1 kHz ±20%
Resonant Frequency (Y)700 Hz ±20%
Resonant Frequency (Z)700 Hz ±20%
Stiffness1.0 N/μm
Recommended max. load (horizontal)*0.2 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAl and Titanium, or Invar
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.



Additional Information

Nano-Man5 Drawing

Nano-Man5 Catalog Pages



Related Products

  • Nano-Align5 Series

  • Nano-Align3 Series

  • Nano-M3Z

  • Nano-M250

  • Nano-M350

  • Accessories

  • Nano-Drive®


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北京欧兰科技发展有限公司为您提供MCL关注纳米MCL提示/倾斜、旋转纳米位移台Man5Nano-Man5，MCL关注纳米Nano-Man5产地为美国，属于位移台，除了MCL提示/倾斜、旋转纳米位移台Man5的参数、价格、型号、原理等信息外，还可为您提供更多位移台,欧兰科技客服电话400-860-5168转1446，售前、售后均可联系。
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