其他null检测 | 工业双频电容耦合射频放电的空间和相位分辨等离子体参数-北京欧兰科技发展有限公司

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The dynamics of high energetic electrons (11.7 eV) in a modified industrial confined dual-frequency capacitively coupled RF discharge (Exelan, Lam Research Inc.), operated at 1.937MHz and 27.118 MHz, is investigated by means of phase resolved optical emission spectroscopy. Operating in a He–O2 plasma with small rare gas admixtures the emission is measured, with one-dimensional spatial resolution along the discharge axis. Both the low and high frequency RF cycle are resolved. The diagnostic is based on time dependent measurements of the population densities of specifically chosen excited rare gas states. A time dependent model, based on rate equations, describes the dynamics of the population densities of these levels. Based on this model and the comparison of the excitation of various rare gas states, with different excitation thresholds, time and space resolved electron temperature, propagation velocity and qualitative electron density as well as electron energy distribution functions are determined. This information leads to a better understanding of the dual-frequency sheath dynamics and shows, that separate control of ion energy and electron density is limited.

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上一篇在一个双稳湍流涡旋火焰中，对间歇性动态的时间-频率定位

下一篇冲击合成射流在大范围参数变化条件下热量传导行为和流场特征研究

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北京欧兰科技发展有限公司

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