方案摘要
方案下载应用领域 | 其他 |
检测样本 | 其他 |
检测项目 | |
参考标准 | 暂无 |
Electron heating, mechanisms of plasma generation, and electron dynamics in dif- ferent types of capacitively coupled radio frequency (CCRF) discharges relevant for industrial applications are investigated by a combination of di®erent experimen- tal diagnostics, simulations and models. Geometrically symmetric and asymmetric single frequency discharges operated at low pressures, geometrically symmetric dual frequency discharges operated at two substantially di®erent frequencies and two sim- ilar frequencies (fundamental and second harmonic with variable phase shift between the driving voltages) as well as hybrid capacitively/inductively coupled (CCP-ICP) RF discharges are studied. Electron heating is found to be strongly a®ected by phenomena characteristic for a certain discharge type, that do not occur in another. At low pressures the generation of highly energetic electron beams by the expand- ing sheath is observed. Such beams propagate through the entire plasma bulk and are re°ected at the opposing plasma boundaries, if the electron mean free path is long enough. An analytical model demonstrates that these beams lead to an en- hanced high energy tail of the electron energy distribution function and are, there- fore, closely related to stochastic heating
在一个双稳湍流涡旋火焰中,对间歇性动态的时间-频率定位
Particle-laden Taylor-Couette流:高阶转变和径向局部波浪涡旋的证据
7根杆束的流体-结构相互作用:用实验数据对比数值模拟
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