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白光干涉仪

报价 ¥10万 - 20万

品牌

Heliotis

型号

heliOptics WLI5

产地

欧洲瑞士

应用领域

暂无
该产品已下架

heliOpticsTM WLI5 - Compact Mirau-Interferometer Module

The heliOpticsTM WLI5 is a component-level 3D-metrology solution for machine builders. Its compact dimensions, small weight, and robust optical design enable innovative interferometer configurations and cost effective system integration.

With a vertical resolution down to nanometers and lateral resolutions down to 0.8 micrometers, the WLI5 is particularly suited for high-precision surface characterization and for measuring geometrical features such as step heights, co-planarity or flatness with extreme accuracy.

 

 

In combination with Heliotis' ultrafast heliCamTM C3, as well as a range of interchangeable lenses, turn-key 3D- metrology is available in custom-tailored configurations. As the fastest scanning white-light interferometer, the WLI5/C3 configuration is ideally suited for the inspection of electronic components and packages, micro-mechanics, MEMS, micro-optics or semiconductors.

Features

  • surface topography down to nanometers

  • measures any surface

  • designed for inspection machines

  • fast and vibration resistant

  • multiple field of views and lateral resolutions

  • software development kit for rapid deployment
    - C++, Python, LabView
    - heliViewer 3.0

 

 

 

Specifications

WLI5 Module

WLI interferometerMirau configuration, exchangeable objectives (10x, 20x, 50x)
light sourcehigh power LED
field of view (*)232x222 μm580x556 μm1160x1112 μm
numerical aperture0.50.40.3
working distance2.52 mm3.57 mm3.57 mm

vertical resolution (*)

(single meas., RMS)

50 nm

1 nm in phase mode

70 nm

1 nm in phase mode

100 nm

1nm in phase mode

vertical scan speed (*)up to 50 mm per second
lateral resolution (*0.8 μm2 μm4 μm
reflectivity of sample (*)< 0.1% to 100%

 

 Companion Modules

heliCam™ C3high-speed camera with the latest heliSense™ S3 CMOS sensor developed by Heliotis featuring in-pixel signal demodulation at up to 1 million images per second and on-camera surface extraction.
lens tubeimaging optics with f=200mm, C-mount
Z-stagelinear stage with optical encoder and advanced servo controller
heliSDK™software development kit for C++, Python and LabView 2013, macros (ImageJ) (scanner control, 3D-camera configuration and readout, data processing algorithms)
custom componentsHeliotis designs and produces application specific optics and mechanical components


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