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美国MTI 晶圆几何参数测试仪
美国MTI公司为半导体行业硅片几何参数测量技术-电容探头领域的佼佼者，与昔日的ADE齐名：为世界半导体业硅片几何参数测量的标准测试设备；都同为纳斯达克上市企业。
晶圆几何参数测量仪产品覆盖手动型、半自动型和全自动型。
主要特点：
1. Diameter: 150mm,200mm,300mm
2. Material: All semiconducting,and semi-insulating matrrials
3.Surfaces: As-Cut, Lapped, Etched,Polished,Patterned; Bare wafer/Quartz Base,Tape
4.Thickness: (ASTM F533),Range-+/-500um;Accracy-+/-0.25um; Repeatability-0.050um
5.TTV: (ASTM F533) Range-+/-500um; Accuracy-+/-0.050um; Repeatablity-0.050um
6.Bow:(ASTM F1390) Range-+/-250um; Accuracy-+/-2.0um; Repeatabiligy-0.75um
7.Flatness(Global)(ASTM F1530) Rang:8mm; Accuracy-+/-0.05um; Repeatbility-0.030um
8.Flatness(Site)(ASTM F1530) Rang:8mm; Accuracy: +/-0.05um; Repeatbiligy:0.030um
Wafer Specifications
Materials | All semiconducting and semi-insulating materials |
Surfaces | As-cut, Lapped, Etched, Polished, Patterned |
Flat/Notch | All SEMI Standard Flat(s) and Notches |
Conductivity | P or N Type |
Wafer Mounting | Bare Wafer, Sapphire/Tape Base |
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