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UV LIGHT & ENERGY METER
For use with all Wafer
Steppers
Model 659
For over 45 years, OAI is a world leader in UV Liight & Energy
Measurement Instrumentation used for reliable accurate calibrated control of the
hotolithography processes in the Semiconductor, MEMS, Wafer Packaging ａnd Wafer
Bumping Industries. The New Model 659 is an advanced UV exposure analyzer
specifically designed for use with all wafer steppers including high intensity
wafer steppers. This meter averages up to 400 exposure readings , has Ethernet
ａnd USB interface for downloading recorded measurements, ａnd has intensity range
of up to 7,500mW/cm2. Probes are available in wavelength of 365nm, 400nm, 420nm
& 436nm.. OAI has a complete certified calibration lab to maintain the
performance, quality ａnd reliability of our meters. The Model 659 meter is
traceable to NIST standards.
METER SPECIFICATIONS
USER INTERFACE: Touch Screen
COMPUTER INTERFACE: Optional ethernet & USB for
downloading recorded measurements
POWER: Battery Operated with
rechargeable 3.7V Lithium Ion with charge protection
CHARGER POWER: 100-240 VAC
DISPLAY SETUP: 2 Screens
1. Set up Screen - ethernet address, date, ａnd time
2. Run Screen – wavelength, intensity, time, dose, probetemperature,
probe type, percent of deviation, serial number, calibration due date, battery
status, probe serial number, ａnd charger status.
MEMORY STORAGE: Up to 400 reading
INTENSITY RANGE: Up to 7,500mW/cm2
INTENSITY RESOLUTION: 0.01mW/cm2
DOSE RANGE: Up to 1000 J/cm3
DOSE RESOLUTION: 0.01mJ/cm3
TIME RANGE: Up to 9999 seconds
TIME RESOLUTION: 0.0001 seconds
MINIUM DOSE EXPOSURE 25 m seconds
DIMENSIONS: 14” X 8.25” X 3.5”
WEIGHT: 3.5 lbs
OPERATING ENVIROMENT: 15 – 40 degre
COMPLIANCE:ROHS2 & CE (EMC & safety)
PROBE SPECIFICATIONS
Options: Non compensated temperature
probe
PROBE DECTOR: Silicon photodiode
AVAILABLE WAVE LENGTHS ( nm) 365, 400, 420, 436
FILTERS: Multilayer
absorption/dielectric
INTENSITY RANGE: Up to 7,500mW/cm2
INTERCHANGEABILITY: Any Model 659 probe can be used with any of the
659 meters
COMPLIANCE: ROHS2 & CE ( EMC &
safety)
售后服务
1年
否
无
免费安装及技术培训
6个月一次。
经确认质量问题，免费更换。
24小时内到达现场并开始维修
UV METER信息由深圳市蓝星宇电子科技有限公司为您提供，如您想了解更多关于UV METER报价、型号、参数等信息，蓝星宇客服电话：400-860-5168转4527，欢迎来电或留言咨询。
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