简单高效的XPS分析-从大面积到微区分析的自动队列功能演示

智能文字提取功能测试中

Run-down of Demonstration Starting the Analysis 简单高效的XPS分析从大面积到微区分析并加上自动队列的功能演示 Wensly Yip葉上遠 2013-5-8 CoreTech D 1. Brief explanation of SmartSoft software operational flow. 2. Introduce today's samples and analysis objectives. 3 samples with different processesExpecting samples'composition Te， Cd， Hg (main elements in interest) Ag， C， O， S， Cl (possible contaminants) 3. Setup to run the samples， and viewing live data. Live data massage. Making the analysis more efficient Large to small area analysis Queue-Function (Q-function) 4. Data Interpretation software-MultiPak 5. Summary ULVAC-PHI，Inc. x106) ag10.spe te10.spe HP to small area explanation and comparison DrHP to small area explanation and comparison Explanation How to choose X-ray setting? Integrated How to choose fPass EnergyStep SizeAnd Time/step Pre-take data on 3 LARGE area SX Webinar.107.spe 4.5 4 3.5 aF 0 3 O' O . WW 2.5 M 2 100?m 12.0 1.5 1 M mwwMJ 0.5 wwww Mww 1100 1000 900 800 700 600 500 400 Binding Energy (eV) Integrated Dc Make multiple points to show powerful Queuefunction. Make 1 more point on platen from Park B toshow multi-platen Queue to show morepowerful Queue function. Integrated Integrated①ULVAC-PHI， inC. IntegratedULVAC-PHI， Inc.CoreTech