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CHAPTER 8. Using PDMS as a thermocurable resist for a mold assisted imprint process ....139
L Malaquin and C. Vieu
8.1 Introduction ............................ 139
8.2 PDMS material ......................................140
8.3 Technological implementation........................144
8.4 Results ............................. .......... 151
8.5 Conclusions and domains of application...............162
CHAPTER 9. Molecules for Microcontact Printing ................ 167
Jurriaan Huskens, Maik Liebau and David N. Reinhoudt
9.1 Introduction ................................ 167
9.2 Quality of printed SAMs ........................... 168
9.3 Microcontact printing of etch resists.................. 171
9.4 Printing functional adsorbates .........................173
9.5 Printing on other substrates .......................... 174
9.6 Microcontact printing in bio-applications ................176
9.7 Conclusions ..................................177
CHAPTER 10. Microcontact Printing Techniques...............181
Massimo Tormen
10.1 Introduction ................................181
10.2 The self-assembly of alkanethiols .............. 183
10.3 The stamp ..................................... 185
10.4 Properties of poly(dimethyl siloxane) elastomers .......185
10.5 Stamps for microcontact printing............... 190
10.6 Stamp fabrication .........................192
10.7 The microcontact printing process.........1............193
10.8 Substrates for microcontact printing...........194
10.9 Printing conditions....................1............196
10.10 Chemical etching .....................197
10.11 Microcontact printing using ultrathin stamps ...........198
10.12 A multilevel process: Mix and Match with accurate alignment
of the CP .............206

CHAPTER 11. Local Oxidation Nanolithography .......... 213
Ricardo Garcia
11.1 Introduction..............................213
11.2 Local oxidation modes......................214
11.3 Liquid meniscus........................217
11.4 Kinetics.........................219
11.5 Mechanism ......... ..................221
11.6 Substrates .....................................222
11.7 Resolution.....................223
11.8 Applications .....................................224

CHAPTER 12. Combined Approaches for Nanoelectronic Device Fabrication ........235
I. Martini, M. Kamp and A. Forchel
12.1 Introduction............................235
12.2 Fabrication of nanoelectronic devices ............236
12.3 Mold fabrication .....................237

12.4 Alignment .................................239
12.5 Alternative polymers ...................244
12.6 Characterization ........................ 246
CHAPTER 13. Application of Nanoimprint Lithography in Magnetism .... 249
Y. Chen, M. Natali, S.P. Li and A. Lebib
13.1 Introduction ............................249
13.2 Physics of patterned magnetic structures ............250
13.3 Nanoimprint lithography parameters .................255
13.4 Patterned magnetic nanostructures ..................262
13.5 Conclusion ...............................268
CHAPTER 14. Application of Microcontact Printing and Nanoimprint Lithography .......... . 271
Georg Schmidt, Tatjana Borzenko, Massimo Tormen, Volkmar Hock, Laurens W. Molenkamp
14.1 Introduction ................... 271
14.2 Process ......................273
14.3 Nanoimprinting of point contacts .......................278
CHAPTER 15. Optical Applications of Nanoimprint Lithography ......287
J. Seekamp
15.1 Introduction ................. 287
15.2 Candidates for and examples of printed optical devices .. 288
15.3 Nanoimprint lithography of photonic devices .........290
15.4 Outlook and conclusion ................ 295


CHAPTER 16. Biotechnology Applications of NIL ........... 297
Lars Montelius and Babak Heidari
16.1 Introduction .......................... 297
16.2 Introduction to NIL .........................297
16.3 Biotechnical application areas for NIL ...............298
16.4 Examples ......................................299
CHAPTER 17. Soft Lithography and Imprint-Based Techniques for
Microfluidics and Biological Analysis .............305
Anne Pdpin and Yong Chen
17.1 Introduction..................305
17.2 Soft lithography .............. ............... 309
17.3 Imprint-based techniques .........................315
17.4 Conclusions and perspectives .........................325

Index 331