【序號】:1 【作者】:D. Monaghan, M. Holik, V. Bellido-Gonzales, J. Bradley 【篇名】: Optimizing Sputter Processes via 3D Magnetic and Plasma Simulation 【期刊】:SVC - 52nd Annual Technical Conference Proceedings 【全文連接】:http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2796 (在Modeling and Control 的第2篇)
【序號】:2 【作者】:Siemers, M.; Pflug, A.; Szyszka, B. 【篇名】:Particle-in-cell Monte Carlo analysis of propagating plasma waves in DC magnetron discharges 【期刊】:SVC - 52nd Annual Technical Conference Proceedings 【全文連接】:http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2796 (在Process Modeling and Control 的第3篇)
【序號】:3 【作者】:Siemers, M.; Pflug, A.; Szyszka, B. 【篇名】:Particle-in-cell Monte Carlo analysis of anomalous target erosion in magnetron sputtering 【期刊】:SVC - 51st Annual Technical Conference Proceedings 【全文連接】:http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2190 (在Process Modeling & Control 的第9篇)
【序號】:4 【作者】:Siemers, M.; Pflug, A.; Szyszka, B. 【篇名】:Three dimensional plasma simulations with a parallelized particle-in-cell Monte Carlo approach 【期刊】:SVC - 49th Annual Technical Conference Proceedings 【全文連接】:http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=1471 (在Large Area Coating 的第13篇)