【序号】:1 【作者】:J. Garnaes, P.-E. Hansen, N. Agersnap, J. Holm, F. Borsetto, and A. Kühle 【题名】:Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy 【期刊】:Applied Optics, 【年、卷、期、起止页码】:Vol. 45, Issue 14, pp. 3201-3212 (2006) 【全文链接】:http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-45-14-3201