【作者】：TM Huang，ST Chang，HL Tsay，MY Hsu，FZ Chen 【题名】：Uniformity of LED light illumination in application to direct imaging lithography 【期刊】 : Proc. SPIE 9954, Fifteenth International Conference on Solid State Lighting and LED-based Illumination Systems 【年、卷、期、起止页码】: August 28, 2016 【链接】：http://xueshu.baidu.com/s?wd=paperuri%3A%2813e92d0cf209d45045a355c700242485%29&filter=sc_long_sign&tn=SE_xueshusource_2kduw22v&sc_vurl=http%3A%2F%2Fproceedings.spiedigitallibrary.org%2Fproceeding.aspx%3Farticleid%3D2552473&ie=utf-8&sc_us=7633084403365274164
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