【序号】：1 【作者】：P J S Pereira, M L Escrivão, M R Teixeira, M J P Maneira and Y Nunes 【题名】：Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes 【期刊、年、卷、期、起止页码】： Plasma Sources Science and Technology, Volume 23, Number 6 【全文链接】：http://iopscience.iop.org/article/10.1088/0963-0252/23/6/065031
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