电子束积碳原理

应助达人

如果样品没有碳，那只能是表面污染了，不存在电子束打出碳来的，电镜里可以一定程度上氧化

From such information a mechanism of contamination has been proposed which involves several stages. Firstly,
gas or vapour molecules present in the vacuum system are adsorbed on all surfaces. These adsorbed
molecules are not tightly bound to the surface although their sticking coefficient increases with decrease
in temperature. Under the action of the electron beam hydrocarbon molecules are polymerized to
produce carbonaceous materials which become fixed.

参考一下

Further molecules then take the place of those which have been decomposed and in turn they suffer the same fate.
Evidence indicates that the molecules are supplied mainly by surface diffusion since flooding a large area of the
specimen with electrons rapidly carbonizes hydrocarbon molecules and delays the build-up of contamination at a particular point.
Many workers rely upon a cold stage to minimize specimen contamination, the hydrocarbons then condensing preferentially on the cooled surface.

请问如果对于不含碳的样品来说，用FIB制样的话，是不是积碳会严重一些呢？

那么对于本身不含碳的无机物来说，空气中吸附的东西这好像是不可避免。
制样的时候有没有其他方式可以减少积碳呢？