使用椭圆偏振光谱仪表征光伏器件

2016/09/21   下载量: 6

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应用领域 半导体
检测样本 光电器件
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Spectroscopic ellipsometry is an ideal technique to characterize film thicknesses and optical constants for photovoltaic applications. Spectroscopic ellipsometers are also sensitive to the presence of rough overlayer and graded optical constants. The technique provides the advantage to be fast, simple to operate and non-destructive for the characterization of the samples.

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Spectroscopic ellipsometry is an ideal technique to characterize film thicknesses and optical constants for photovoltaic applications. Spectroscopic ellipsometers are also sensitive to the presence of rough overlayer and graded optical constants.

The technique provides the advantage to be fast, simple to operate and non-destructive for the characterization of the samples.


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