Thin Film Stress Measurement Using Dektak Stylus Profilers

2008/07/21   下载量: 158

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Accurate stress measurement helps process developers avoid nonplanarity effects to ensure uniform deposition and high part performance. for samples up to 200mm in diameter. The Stress Measurement Analysis option for Dektak stylus profilers gives you the flexibility to accurately characterize film stress, as well as roughness and steps, for comprehensive film analysis on a single platform .

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