VOYAGER 高性能电子束曝光系统

VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.

With features including

• Highly ergonomic human-machine interface ErgoFlow

• Unique formula-based patterning technology algorithmixx

• Flexible directional shape-filling modes FLEXposure

• Stitching-error-free continuous writing modes traxx and periodixx, based on moving stage technology

• 50 kV thermal field emission column technology

• Fully automated write field calibration

• Automatic focus and stigmator setup

• Automatic switch between high-resolution and high-throughput writing modes

VOYAGER stands for innovation, stable high performance, and ease of use, all at an attractive price/performance ratio throughout the lifetime of the instrument. The VOYAGER electron beam lithography system comes with an environment-tolerant shield which ensures system stability even in less ideal laboratory environments.

Ergonomic interface and automated EBL for shortest time to result

VOYAGER incorporates Raith’s eWrite technology. eWrite combines dedicated EBL electron optics with the latest innovations in pattern generator design that automate system calibrations and batch fabrication. All required corrections throughout the entire exposure job are applied pixel by pixel and “on the fly,” thus saving enormous process time overheads. Depending on the pattern, writing speeds of more than 1 cm²/h can be obtained at highest resolution.

And the degree of automation even goes a step further with the new ergonomic human-machine interface, ErgoFlow. With the help of this smart workflow, professional lithography becomes accessible to everyone – regardless of the level of expertise. ErgoFlow complements the widely used Raith Nanosuite standard software and consists of two elements.

In a first step, any user can easily define an EBL job, which is then parametrized and executed in a second step by a more experienced user. With VOYAGER’s unique sample leveling system, even manual leveling and prealignment are taken care of automatically, thus saving time and drastically increasing your efficiency.

Thanks to its simple usability, ErgoFlow can also leverage interdisciplinary research and sample exchange even between different university faculties or industrial departments.