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德国METROLUX的ML4560波前传感器
波前传感器由传感器头部和新软件raylux ML1240组成，它具有高动态范围及高精度。传感器头部为预校准的，基准波前已置于软件之内。无需再校准即可进行高精度的测量。该软件包括激光波前的分析，并且光束质量分析软件beamlux ML1200符合ISO标准。运用ML3743摄像头，可随意的对光束进行分析。
CCD-Sensor | 2/3” |
Dynamic | 12bit |
Pixel # | 1392 x 1040 |
Wavelength range with optional converter | 350 nm - 1100 nm 190 nm - 350 nm |
Pupil size | 8.97 x 6.71 mm |
Max. frame rate | 15 fps |
Spatial Resolution | 200 μm |
Number of Sub Apertures | 45 x 34 |
Dynamic Range (Tilt) | ± 1,6° (730 lamda) |
Wavefront Accuracy | < 16 μrad |
Dynamic Range (Focus) | 72 mm (370 lamda) |
Accuracy | 5 x 10-4 /m |
System Accuracy | 10 nm |
Repeatability | 100 nm |
Wavefront Accuracy | 50 nm |
Metrolux 激光M平方计
具有完备的激光光束分析软件 可进行单脉冲M2测量
wavelength | 400-700nm//700-1100 nm | others on request |
Laserbeam diameter | <6mm | others on request |
Energy Density | < 5 J/cm² | with additional attenuator |
Power Density | < 1000 W/cm² | with additional attenuator |
Single pulse detection | < 1000 Hz |
|
M² | 1..20 | accuracy +-3% |
Measuring frequency | 5 Hz |
|
Attenuation | 1...1.000.000 | automatic |
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