【求助】求助！！！Delta Plus XP的离子源清洗方法！

我也想知道，哪位好心人给点儿建议，手册上讲的太简单了。

8.6.4 CLEANING THE ION SOURCE PARTS
8.6.4.1 CLEANING THE METALLIC PARTS
1. Grind all contaminated and discolored metal parts with aluminum oxide powder
(600 grain). The mechanical cleaning described above must be followed by a chemical
cleaning.
2. All parts must be cleaned within a grease dissolving cyclohexane bath. An ultra sonic bath
will improve and accelerate the cleaning procedure.
NOTE: Do not use ultrasonic when cleaning the ion source magnets.
3. Afterwards all parts made of stainless steel should be cleaned in a 3% RBS 50 solution at
60 °C for about 1 or 2 hours.
4. After cleaning in RBS 50 and in distilled water, the parts should be dried chemically within
a Freon bath or a pure alcohol.
5. After chemical drying, the parts should be additionally dried by a fan or a drying oven to
eliminate solvent residuals.
8.6.4.2 CLEANING THE CERAMIC INSULATORS
1. Use a clean diamond file for eliminating metal abrasion and evaporated films. Use this
method only for cleaning the ceramic insulator of the cathode and the electron collector.
2. Anneal the ceramic spacer rings to red heat. Use a propane-oxygen flame or a muffle furnace
for annealing (maximum temperature: 800-1000 °C).
Fig. 8.3 Ion Source (Part No.: 111 9440)

Source Feedthrough, see fig. 8.4
Source Wiring, see fig. 8.5



Pos. 26/26a are not shown



NOTE: The parts marked with an asterisk (*) frequently break. It is recommended
to provide for replacements before the source is opened.









Fig. 8.4 Source Feedthroughs




Fig. 8.4 a Connection Scheme for Lamps
For part numbers, see page 8 – 46.











Fig. 8.5 Source Wiring