【序号】：1 【作者】：R.L. Smith and S.D. Collins 【题名】：Thick films of silicon nitride 【期刊】：Sensors and Actuators A: Physical 【年卷期】：Volume 23, Issues 1-3, April 1990, Pages 830-834 【全文链接】：http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-44CJ2HG-3&_user=3360530&_coverDate=04%2F30%2F1990&_alid=1070297369&_rdoc=60&_fmt=high&_orig=search&_cdi=5282&_sort=r&_st=4&_docanchor=&_ct=77&_acct=C000060334&_version=1&_urlVersion=0&_userid=3360530&md5=7a3e1ad3544a5d10082b804386ce32d9
【序号】：2 【作者】：M. Serenyi, W. Lauer and H.-U. Habermeier 【题名】：Sputtering and in situ characterization of the optical properties of silicon nitride 【期刊】：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 【年卷期】：Volume 18, Issues 1-6, 1986, Pages 659-661 【全文链接】：http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TJN-4KMBGNN-3S&_user=3360530&_coverDate=12%2F31%2F1986&_alid=1070297369&_rdoc=42&_fmt=high&_orig=search&_cdi=5315&_sort=r&_st=4&_docanchor=&_ct=77&_acct=C000060334&_version=1&_urlVersion=0&_userid=3360530&md5=93dea007ee6beb7f4dd678288b04f74a
【序号】：3 【作者】：S. M. Hu, J 【题名】：Properties of amorphous silicon nitride films 【期刊】：Electrochem. Soc. 【年卷期】：Volume 113, No. 7, July (1966), p. 693. 【全文链接】：http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V47-47WT8PJ-1MW&_user=3360530&_coverDate=11%2F30%2F1967&_alid=1070297369&_rdoc=76&_fmt=high&_orig=search&_cdi=5751&_sort=r&_st=4&_docanchor=&_ct=77&_acct=C000060334&_version=1&_urlVersion=0&_userid=3360530&md5=847dbed196ecebcaaf6db6ac45c0d29c 【序号】：4 【作者】：Manju Gupta, V.K. Rathi, R. Thangaraj, O.P. Agnihotri and K.S. Chari 【题名】：The preparation, properties and applications of silicon nitride thin films deposited by plasma-enhanced chemical vapor deposition 【期刊】：Thin Solid Films 【年卷期】：Volume 204, Issue 1, 20 September 1991, Pages 77-106 【全文链接】：http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TW0-46SXRNT-7N&_user=3360530&_coverDate=09%2F20%2F1991&_alid=1070297369&_rdoc=49&_fmt=high&_orig=search&_cdi=5548&_sort=r&_st=4&_docanchor=&_ct=77&_acct=C000060334&_version=1&_urlVersion=0&_userid=3360530&md5=05093a294fadd5fb024f87ce1e816acd
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