【原创】如何摆脱电镜污染物? ( 电镜用户必看之维护篇 )

基本上在美国电镜市场XEI产品已经很普遍了, 由于此类附件只有XEI公司专利生产所以占有率100%.

看上去好像很方便使用,个人认为正是大家所缺少的而应该必配的附件.

如果不贵我就申请采购一个,不知道能否加在我的4800上面, 感觉她容易污染而且这两年效果不如以前了

冷场成功案例:
Hitachi S4700: Spansion, Sunnyvale, California, USA
Improved resolution was observed, on a 5 year old instrument so that sputtered PT grains could be imaged at 5kV and < 3 nm resolution. The user says that the Evactron De-Contaminator is the only accessory one can buy for the SEM that will improve the performance of the instrument.

Hitachi S-4700: NIST Gaithersburg, Maryland, USA
NIST borrowed and later purchased an Evactron D-C for controlling contamination in an Hitachi S-4700 SEM. Their research on contamination control resulted in the paper "Active Monitoring and Control of Electron Beam Induced Contamination" Proc. SPIE Vol. 4344 (2001), 835, by András E. Vladár, Michael T. Postek and Ronald Vane. This study found that the Evactron device was "effective in cleaning the vacuum of the specimen chamber of laboratory and production metrology SEMs."

Hitachi S-4700: Oak Ridge National Laboratory, High Temperature Materials Lab, Oak Ridge, Tennessee, USA
Roughing pump oil backstreaming through the sample exchange chamber was causing dirty specimens and chamber contamination that could not be controlled with a liquid nitrogen (LN) cold finger. Contamination is controlled by use of both the plasma cleaning and the nitrogen purge features of an automatic Evactron system.

Hitachi S-4700: University of Illinois, Champaign-Urbana, Illinois, USA
A three year old Hitachi S-4700 SEM had constant contamination problems since being installed. The user had added a turbomolecular pump and heated micromaze foreline trap, but they made little difference. LN traps, top and bottom, had been kept in service constantly, but failed to stop contamination problems.

看上去不错，最好有机会到我们测试中心来给我试试。好的话，一定买，现在的维护方法确实太不到位了。

这两年我们实验的电镜也是，做了这么多次的烘烤也没有什么明显改善。看来应该试试这个办法

烘烤的方式不能完全去除电镜样品室以及镜筒的污染物， 而且现在维修费用很高， 其实烘烤对于电镜也有一定损伤，而这个产品不会她可以很轻松而且对电镜没有任何损害的去除污染物。

溢鑫科创公司除了一般Evactron plsama Cleaner产品外， 因为这个等离子就像探测器一样客户可以很方便使用，也很方便拿下来用于样品的预处理以及脆弱样品的保护和透射样品杆的清洁（有提供透射样品杆插入清洁的接口）。请看附件说明。




选配这个Chamber可以把cleaner的发射装置很方便拿下来后对其样品进行清洁预处理，而且还可以对透射样品杆进行清洗（chamber上有专门供透射样品杆插入的连接孔）

预处理样品室（可清洁样品保固敏感样品以及透射样品杆）， 使用方便，无需维护。

应助达人

请问是需要清洗的时候安装上去，还是工程师安装固定在电镜上了？如果是随用随装，还可以用于多台电镜呢