timba
第5楼2012/08/20
谢谢
I realised there are many mistakes in my Chinese, thanks for saying I can write in English.
I am working on sputtered PZT thin films for MEMS. I want to measure the Pb, Zr, and Ti content of the film. I think ICP-MS should be a suitable instrument for this, am I right? Either using LA-ICP-MS, or by using ordinary ICP-MS after dissolving the thin film in HF and HNO3.
The HF solution will probably be too concentrated to measure directly, so this can be diluted before measuring. I wonder what concentration of Pb is most suitable for measuring with ICP-MS?
My fellow students and I are looking for somewhere to do these measurements. I know there are some ICP-MS in PKU in the School of Earth Sciences, we are asking them but not sure if they can handle our samples or are open in the summer holidays. Can anyone suggest something? Does anyone know of any other ICP-MS equipment at PKU or nearby?
Thanks very much for your help and comments,
Tim
光哥, 请问:只武汉有LA-ICP-MS,是不是?谢谢你
timstoicpms
第8楼2012/08/20
原位微区分析的 LA-ICP-MS 最能满足你的需要,但它的条件苛刻。
标准物质与待测样品 基体匹配( calibration-standards and unknown-samples are matrix-matched ) 是LA-ICP-MS获得准确可靠测试结果的必要条件。以你的案例,必须先找一张【各种元素数据都被认证、并且成分均匀】的薄膜当标样。否则会产生比较严重的基体效应。参见 http://bbs.instrument.com.cn/shtml/20120512/4029584/
用HNO3 HF溶解薄膜后,必须赶酸,使最终溶液是硝酸介质。北大地质系的 ICP-MS运行得很一般,建议你找别的单位。
光哥
第9楼2012/08/21
抱歉,那个是我知道的一家。其他应该也有很多地方有的。另外如果您不嫌麻烦的话,多掏点银子找上海的埃文斯用SIMS分析应该也能满足的,样品在上海就可以做了,那里有台cameca-4f。如果您需要那边的联系方式,可以站短我,我还保留着他们的电话