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2017/08/25

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【序号】：1
【作者】：Yun-Jiang Rao and David A Jackson
【题名】：Recent progress in fibre optic low-coherence interferometry
【期刊、年、卷、期、起止页码】：Measurement Science and Technology, Volume 7, Number 7
【全文链接】：http://iopscience.iop.org/article/10.1088/0957-0233/7/7/001
【序号】：2
【作者】：Sungmuk Lee; Shi-kay Yao; Michele Nuhn;
【题名】：Alignment Wavelength Optimization For Wafer Stepper Microscope
【期刊、年、卷、期、起止页码】：Proc. SPIE 0633, Optical Microlithography V, (20 August 1986);
【全文链接】：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0633/1/Alignment-Wavelength-Optimization-For-Wafer-Stepper-Microscope/10.1117/12.963705.short?SSO=1
【序号】：3
【作者】：Brenda CantellJosé RamírezWilliam Gadson
【题名】：Optimization of a Wafer Stepper Alignment System Using Robust Desig
【期刊、年、卷、期、起止页码】：Statistical Case Studies for Industrial Process Improvement
【全文链接】：http://epubs.siam.org/doi/10.1137/1.9780898719765.ch20
【序号】：4
【作者】： Stefan Wittekoek et.al
【题名】：Deep-UV wafer stepper with through-the-lens wafer to reticle alignment
【期刊、年、卷、期、起止页码】：Proceedings Volume 1264, Optical/Laser Microlithography III; (1990)
【全文链接】：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1264/1/Deep-UV-wafer-stepper-with-through-the-lens-wafer-to/10.1117/12.20207.short?SSO=1
【序号】：5
【作者】：Debesh Choudhury
【题名】：Teaching the concept of convolution and correlation using Fourier transform
【期刊、年、卷、期、起止页码】：Proceedings Volume 10452, 14th Conference on Education and Training in Optics and Photonics: ETOP 2017; 104520Y (2017);
【全文链接】：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10452/104520Y/Teaching-the-concept-of-convolution-and-correlation-using-Fourier-transform/10.1117/12.2267976.full