方案摘要
方案下载应用领域 | 电子/电气 |
检测样本 | 其他 |
检测项目 | |
参考标准 | 0 |
Phase Modulated Spectroscopic Ellipsometry is an excellent technique for the highly accurate characterization of complete TFT-LCD device. The technique allows the determination of film thickness, optical properties but also more complex properties such as graded or anisotropic layers and effect of dopants. In the flat panel industry the pressure to reduce manufacturing costs is and reliable metrology tools are required to control the different steps of the process. Spectroscopic ellipsometry is a non destructive technique which presents advanced capabilities and proven reliability tailored for qualification and on-line production control.
Phase Modulated Spectroscopic Ellipsometry is an excellent technique for the highly accurate characterization of complete TFT-LCD device. The technique allows the determination of film thickness, optical properties but also more complex properties such as graded or anisotropic layers and effect of dopants.
In the flat panel industry the pressure to reduce manufacturing costs is and reliable metrology tools are required to control the different steps of the process. Spectroscopic ellipsometry is a non destructive technique which presents advanced capabilities and proven reliability tailored for qualification and on-line production control.
颗粒分析+混合氧化石墨烯+分散状态的混合比例
颗粒分析+聚苯乙烯乳胶混合样品+粒径分布
颗粒分析+二氧化硅+CMP浆料质量控制
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