纳米电子束

本报讯 据澳大利亚莫纳什大学网站报道，澳大利亚研究人员正在研制世界最强大的纳米设备之一——电子束曝光系统(EBL)。该系统可标记纳米级的物体，还可在比人发直径小1万倍的粒子上进行书写或者蚀刻。 　　电子束曝光技术可直接刻画精细的图案，是实验室制作微小纳米电子元件的最佳选择。这款耗资数百万美元的曝光系统将在澳大利亚亮相，并有能力以很高的速度和定位精度制出超高分辨率的纳米图形。该系统将被放置在即将完工的墨尔本纳米制造中心(MCN)内，并将于明年3月正式揭幕。 　　MCN的临时负责人阿彼得凯恩博士表示，该设备将帮助科学家和工程师发展下一代微技术，在面积小于10纳米的物体表面上实现文字和符号的书写和蚀刻。此外，这种强大的技术正越来越多地应用于钞票诈骗防伪、微流体设备制造和X射线光学元件的研制中，还可以支持澳大利亚同步加速器的工作。 　　凯恩说：“这对澳大利亚科学家研制最新的纳米仪器十分重要，其具有无限的潜力，目前已被用于油漆、汽车和门窗的净化处理，甚至对泳衣也能进行改进。而MCN与澳大利亚同步加速器相邻，也能吸引更多的国际研究团队的目光。” 　　MCN的目标是成为澳大利亚开放的、多范围的、多学科的微纳米制造中心。该中心将支持环境传感器、医疗诊断设备、微型纳米制动器的研制，以及新型能源和生物等领域的研究和模型绘制。除电子束曝光系统外，MCN中还包含了高分辨率双束型聚焦离子束显微镜、光学和纳米压印光刻仪、深反应离子蚀刻仪和共聚焦显微镜等众多设备。 　　凯恩认为：能够介入这种技术使我们的科学家十分兴奋，它可以确保我们在未来十年内在工程技术前沿领域的众多方面保持领先地位，也将成为科学家在纳米范围内取得更大成就的重要基点。(张巍巍)

生物体从宏观到微观，再到纳米尺度的多级复合结构，使其具有诸多独特的优异性能。人们很早就开始模仿生物的特殊功能，来发明和应用新技术。例如人们根据苍蝇特殊的“复眼”结构，仿照制成了“蝇眼透镜”，用它作镜头可以制成“蝇眼照相机”，一次就能照出千百张相同的相片；还有仿照水母耳朵的结构和功能，人们设计了水母耳风暴预测仪；根据蛙眼的视觉原理，研制成功了一种电子蛙眼，能准确无误地识别出特定形状的物体！图：苍蝇特殊的“复眼”结构（图片来源于网络）这就是早期的仿生学应用，但随着科技的进步和纳米技术的迅速发展，人们开始将仿生学应用到纳米尺度，研究者通过模仿生物的纳米结构仿生制造出类似的超微结构，以此来探究和获取生物的特殊功能。在纳米微结构加工领域，常用的微纳光刻技术有纳米压印、紫外光刻、X射线曝光等技术。而在最近的一项研究中，昆士兰科技大学的研究团队首次将电子束曝光（EBL）技术应用于生物纳米结构的仿生制造，并取得了重要研究成果。目前，该项研究论文已被Journal of Materials Chemistry（IF=4.776）录用，论文题目为Multi-biofunctional properties of three species of cicada wings and biomimetic fabrication ofnanopatterned titanium pillars。研究中涉及的大量仿生制备工作由TESCAN 的EBL完成，并使用了TESCAN MIRA3场发射扫描电子显微镜表征细胞间相互作用。图：研究论文已被Journal of Materials Chemistry（IF=4.776）录用由于蝉翼具有多功能生物特性，如超疏水性，自清洁和杀菌作用等，人们对其在生物医学上的应用产生了浓厚兴趣。昆士兰科技大学Prasad KDV Yarlagadda及其研究团队对蝉翼的杀菌和细胞相容特性进行了系统研究，并首次使用电子束曝光技术（EBL）进行蝉翼结构的仿生制造，加工出类似的纳米锥阵列结构，经研究发现，其同样具有杀菌和生物相容性。首先，研究人员使用了SEM，AFM，TEM等多种微观分析技术对三种不同种类的澳大利亚蝉翅膀表面的纳米结构进行了表征。研究人员观察到，三种蝉翼表面均具有独特的形貌结构，虽然凸起的高度、直径、间距和密度并不完全相同，但都呈现出锥状的纳米柱阵列。图：不同物种的蝉翅具有不同高度、间距、直径和密度的纳米柱结构研究人员分别采用了在蝉翼上附着铜绿假单胞菌、金黄色葡萄球菌细胞和人成骨细胞的方法来探究昆虫翅膀的杀菌活性和生物相容性。实验证明，三种蝉翼均具有很好的杀菌活性，且附着人成骨细胞的蝉翅细胞形态在24小时后仍然保持完整，表明它们仍然具有生物相容性。在该项研究中，研究人员尝试进行蝉翼结构的仿生制造。由于是纳米尺度的阵列结构，一般的刻蚀、沉积方法均无法实现。而常规的电子束曝光（EBL）技术也无法实现如此规模的锥体制造。昆士兰科技大学的研究团队巧妙地利用电子束在光刻胶中的散射，通过控制电子束能量，制作出椎体的“模子”，然后利用沉积生长出需要的椎体，最后腐蚀掉所有光刻胶，得到了完美的纳米锥阵列。图：仿生纳米锥阵列的制作过程示意图最终制备的仿生Ti纳米锥的高度为116 ~282nm，锥形柱的顶端直径最小达13.3nm，底部直径93.6nm左右。并且，进一步实验发现，其同样具有杀菌性和生物相容性。昆士兰科技大学的这项研究成果对于纳米仿生学的应用具有重大意义。 图：通过EBL技术制备的仿蝉翼结构的Ti纳米锥陈列图：（E）在制备出的仿生Ti纳米锥阵列上附着铜绿假单胞菌细胞；（F）对照Ti柱和仿生纳米Ti柱上附着的人成骨细胞的活性；（G）在仿生Ti纳米锥阵列上附着扩散良好的成骨细胞；电子束曝光（EBL）技术是一种电子束直写技术，是利用电子束在涂有对电子敏感的高分子聚合物（光刻胶）的基底上直接描画出图形，通过刻蚀实现微小结构的加工。电子束曝光（EBL）技术避免了传统方法中对模板加工和使用的复杂过程，其高分辨、高度灵活性、高灵敏度的特点也受到研究人员关注，且EBL制备方法更加简单，更容易制备出小尺寸的各种花样的周期性结构。在上述工作中，昆士兰科技大学研究团队使用了TESCAN MIRA3高分辨场发射扫描电子显微镜搭配TESCAN自主研发的电子束曝光（EBL）技术出色完成了相关工作。不久前，昆士兰科技大学新采购了一台TESCAN最新的S8000X Xe Plasma FIB-SEM，这是一款功能强大的氙等离子源FIB，配置了TESCAN最新一代的多项专利技术，期待昆士兰科技大学未来取得更多的研究成果！图：昆士兰科技大学最新采购的TESCAN S8000X Xe等离子源FIB-SEM 注释：该项研究由昆士兰科技大学研究团队完成，相关论文目前已通过了英国皇家化学学会（Royal Society of Chemistry）评审，论文稿件已被录用，将于不久后在网上公开发布。

div class=" rich_media_content " id=" js_content" style=" margin: 0px padding: 0px overflow: hidden color: rgb(51, 51, 51) font-size: 17px overflow-wrap: break-word text-align: justify position: relative z-index: 0 font-family: -apple-system-font, BlinkMacSystemFont, " helvetica=" " pingfang=" " hiragino=" " sans=" " microsoft=" " yahei=" " font-style:=" " font-variant:=" " font-weight:=" " letter-spacing:=" " text-indent:=" " text-transform:=" " white-space:=" " word-spacing:=" " -webkit-text-stroke-width:=" " background-color:=" " section class=" " style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important white-space: normal " p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) font-size: 15px line-height: 22.5px letter-spacing: 1px font-family: 宋体, SimSun " 生物体从宏观到微观，再到纳米尺度的多级复合结构，使其具有诸多独特的优异性能。人们很早就开始模仿生物的特殊功能，来发明和应用新技术。 /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) letter-spacing: 1px font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% letter-spacing: 1px font-size: 15px line-height: 22.5px " 例如人们根据苍蝇特殊的“复眼”结构，仿照制成了“蝇眼透镜”，用它作镜头可以制成“蝇眼照相机”，一次就能照出千百张相同的相片；还有仿照水母耳朵的结构和功能，人们设计了 /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px letter-spacing: 1px " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) letter-spacing: 1px font-size: 15px line-height: 22.5px " 水母耳风暴预测仪；根据蛙眼的视觉原理，研制成功了一种电子蛙眼，能 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) letter-spacing: 1px font-size: 15px line-height: 22.5px background: white none repeat scroll 0% 0% " 准确无误地识别出特定形状的物体 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) letter-spacing: 1px font-size: 15px line-height: 22.5px " ? /span /span /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/1d1bb32e-3372-45b8-b9f6-aecdb9c4480d.jpg" title=" 2.jpg" alt=" 2.jpg" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 苍蝇特殊的“复眼”结构（图片来源于网络） /span /em /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em text-align: justify " span style=" box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-family: 宋体, SimSun margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 这就是早期的仿生学应用，但随着科技的进步和纳米技术的迅速发展，人们开始将仿生学应用到纳米尺度，研究者通过模仿生物的纳米结构仿生制造出类似的超微结构，以此来探究和获取生物的特殊功能。在纳米微结构加工领域，常用的微纳光刻技术有纳米压印、紫外光刻、X射线曝光等技术。 /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em text-align: left " span style=" font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 而在最近的一项研究中，昆士兰科技大学的研究团队 /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 首次将电子束曝光（EBL）技术应用于生物纳米结构的仿生制造 /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 并取得了重要研究成果 /strong 。目前，该项研究论文已被 /span em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " Journal of Materials Chemistry /span /em /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px color: rgb(136, 136, 136) " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " （ /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " IF=4.776 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " ） /span /em /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 录用，论文题目为 /span em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " Multi-biofunctional properties of three species of cicada wings and biomimetic fabrication ofnanopatterned titanium pillars /span /em span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 。 /span /span /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em text-align: left " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 研究中涉及的 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 大量仿生制备工作由 /strong /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " TESCAN& nbsp /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 的 /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " EBL /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 完成 /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ，并使用了 /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " TESCAN MIRA3 /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 场发射扫描电子显微镜表征细胞间相互作用 /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 。 /span /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em text-align: center " span style=" line-height: 22.5px color: black margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " img src=" https://img1.17img.cn/17img/images/201903/uepic/a35e931d-e573-43b1-b2e3-19aec186d880.jpg" title=" 3.jpg" alt=" 3.jpg" / /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px color: black font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 研究论文已被 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " Journal of Materials Chemistry /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " （ /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " IF=4.776 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " ） /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 录用 /span /em /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 由于蝉翼具有多功能生物特性，如超疏水性，自清洁和杀菌作用等，人们对其 /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px " 在生物医学上的应用 span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px color: black " 产生了浓厚兴趣。昆士兰科技大学 /span /span em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " Prasad KDV Yarlagadda /span /em span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 及其研究团队对蝉翼的杀菌和细胞相容特性进行了系统研究，并 /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " 首次使用电子束曝光技术（ /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " EBL /span /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px " ）进行蝉翼结构的仿生制造 /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 加工出 /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 类似的纳米锥阵列结构， /strong 经研究发现，其 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 同样具有杀菌和生物相容性 /strong 。 /span /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-family: 宋体, SimSun margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 首先，研究人员使用了SEM，AFM，TEM等多种微观分析技术对三种不同种类的澳大利亚蝉翅膀表面的纳米结构进行了表征。研究人员观察到，三种蝉翼表面均具有独特的形貌结构，虽然凸起的高度、直径、间距和密度并不完全相同，但都呈现出锥状的纳米柱阵列。 /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black font-family: 宋体, SimSun " br style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " / /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/7a2f8f38-2397-4cfd-9bc6-e54722e8408a.jpg" title=" 4.jpg" alt=" 4.jpg" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px line-height: 21px background: white none repeat scroll 0% 0% " 不同物种的蝉翅具有不同高度、间距、直径和密度的纳米柱结构 /span /em /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-family: 宋体, SimSun margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 研究人员分别采用了在蝉翼上附着铜绿假单胞菌、金黄色葡萄球菌细胞和人成骨细胞的方法来探究昆虫翅膀的杀菌活性和生物相容性。实验证明，三种蝉翼均具有很好的杀菌活性，且附着人成骨细胞的蝉翅细胞形态在24小时后仍然保持完整，表明它们仍然具有生物相容性。 /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 0, 0) font-family: 宋体, SimSun letter-spacing: 1px margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px " 在该项研究中，研究人员尝试进行蝉翼结构的仿生制造。由于是纳米尺度的阵列结构，一般的刻蚀、沉积方法均无法实现。而常规的电子束曝光（EBL）技术也无法实现如此规模的锥体制造。 /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px letter-spacing: 1px font-size: 15px color: rgb(0, 0, 0) font-family: 宋体, SimSun " 昆士兰科技大学的研究团队 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 巧妙地利用电子束在光刻胶中的散射 /strong ， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 通过控制电子束能量 /strong ， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 制作出椎体的“模子” /strong ，然后 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 利用沉积生长出需要的椎体 /strong ，最后腐蚀掉所有光刻胶， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 得到了完美的纳米锥阵列 /strong 。 /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px letter-spacing: 1px font-size: 15px color: rgb(0, 0, 0) font-family: 宋体, SimSun " /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/d17d1ca2-607e-4fd8-a567-b4576f6cf055.jpg" title=" 5.jpg" alt=" 5.jpg" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px line-height: 21px background: white none repeat scroll 0% 0% " 仿生纳米锥阵列的制作过程示意图 /span /em /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-family: 宋体, SimSun margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 最终制备的仿生Ti纳米锥的高度为116 ~282nm，锥形柱的顶端直径最小达13.3nm，底部直径93.6nm左右。并且， strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 进一步实验发现，其同样具有杀菌性和生物相容性 /strong 。昆士兰科技大学的这项研究成果对于纳米仿生学的应用具有重大意义。& nbsp br/ /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" line-height: 22.5px color: black margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/77a6fae3-0d6c-41a1-889b-fb64fb4de48f.jpg" title=" 6.jpg" alt=" 6.jpg" style=" width: 600px height: 192px " width=" 600" vspace=" 0" height=" 192" border=" 0" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 通过 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " EBL /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 技术制备的仿蝉翼结构的 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " Ti /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 纳米锥陈列 /span /em /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px font-family: 宋体, SimSun " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px font-family: 微软雅黑, sans-serif color: rgb(0, 122, 170) background: white none repeat scroll 0% 0% " /span /em /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/d4e4f267-227c-4ac9-bef0-70e9490d9095.jpg" title=" 7.jpg" alt=" 7.jpg" style=" width: 600px height: 165px " width=" 600" vspace=" 0" height=" 165" border=" 0" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 122, 170) font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px letter-spacing: 1px " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " 图： /span /em /span /strong span style=" margin: 0px padding: 0px max-width: 100% letter-spacing: 1px " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " （ /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " E /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " ）在制备出的仿生 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " Ti /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " 纳米锥阵列上附着铜绿假单胞菌细胞； /span /em /span em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " （ /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " F /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " ）对照 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " Ti /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " 柱和仿生纳米 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " Ti /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " 柱上附着的人成骨细胞的活性；（ /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " G /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " ）在仿生 /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " Ti /span /em em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic font-size: 14px letter-spacing: 1px " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 21px letter-spacing: 0.5px background: white none repeat scroll 0% 0% " 纳米锥阵列上附着扩散良好的成骨细胞； /span /em /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 电子束曝光（ /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " EBL /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ）技术 /span /span /strong span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 是一种电子束直写技术，是利用电子束在涂有对电子敏感的高分子聚合物 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px font-size: 15px letter-spacing: 1px color: rgb(136, 136, 136) " （光刻胶） /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 的基底上直接描画出图形，通过刻蚀实现微小结构的加工。电子束曝光（ /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " EBL /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ）技术 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 避免了传统方法中对模板加工和使用的复杂过程 /strong ，其 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " 高分辨、高度灵活性、高灵敏度 /strong 的特点也受到研究人员关注，且 /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " EBL /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 制备方法更加简单，更容易制备出小尺寸的各种花样的周期性结构。 /span /span /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 在上述工作中，昆士兰科技大学研究团队使用了 /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " TESCAN MIRA3 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 高分辨场发射扫描电子显微镜搭配 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " TESCAN /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 自主研发的电子束曝光 strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-size: 15px letter-spacing: 1px text-indent: 28px white-space: normal " span style=" font-size: 15px letter-spacing: 1px margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px color: black " （ /span span style=" font-size: 15px letter-spacing: 1px margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px color: black " EBL /span span style=" font-size: 15px letter-spacing: 1px margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important line-height: 22.5px color: black " ） /span /strong 技术 /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 出色完成了相关工作。 /span /span /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 28px line-height: 1.75em " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px letter-spacing: 1px font-family: 宋体, SimSun " span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 不久前，昆士兰科技大学新采购了一台 /span strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " TESCAN /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " 最新的 /span span style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important letter-spacing: 1px font-size: 15px line-height: 22.5px color: black " S8000X Xe Plasma FIB-SEM /span /strong span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ，这是一款功能强大的氙等离子源 /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " FIB /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " ，配置了 /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " TESCAN /span span style=" margin: 0px padding: 0px max-width: 100% font-size: 15px line-height: 22.5px color: black " 最新一代的多项专利技术，期待昆士兰科技大学未来取得更多的研究成果！ /span /span /p p style=" text-align: center" img src=" https://img1.17img.cn/17img/images/201903/uepic/05bb9e46-ded2-4c0d-87c8-d28cc7511e52.jpg" title=" 8.jpg" alt=" 8.jpg" style=" width: 450px height: 314px " width=" 450" vspace=" 0" height=" 314" border=" 0" / /p p style=" margin: auto 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-align: center line-height: 1.75em " span style=" box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% letter-spacing: 1px font-family: 宋体, SimSun " strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px background: white none repeat scroll 0% 0% " 图： /span /em /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px font-weight: normal background: white none repeat scroll 0% 0% " 昆士兰科技大学最新采购的 /span /em /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px font-weight: normal background: white none repeat scroll 0% 0% " TESCAN S8000X Xe /span /em /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px font-weight: normal background: white none repeat scroll 0% 0% " 等离子源 /span /em /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" letter-spacing: 1px color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 14px line-height: 21px font-weight: normal background: white none repeat scroll 0% 0% " FIB-SE /span /em /strong strong style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important " em style=" margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important font-style: italic " span style=" color: rgb(0, 122, 170) margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important font-size: 15px line-height: 22.5px letter-spacing: 0.5px font-weight: normal background: white none repeat scroll 0% 0% " M /span /em /strong /span /p p style=" margin: 0px 8px padding: 0px max-width: 100% box-sizing: border-box !important word-wrap: break-word !important clear: both min-height: 1em text-indent: 32px line-height: 1.75em " span style=" font-size: 14px letter-spacing: 1px margin: 0px padding: 0px max-width: 100% box-sizing: border-box !important overflow-wrap: break-word !important color: rgb(136, 136, 136) font-family: 宋体, SimSun " 注释：该项研究由昆士兰科技大学研究团队完成，相关论文目前已通过了英国皇家化学学会（Royal Society of Chemistry）评审，论文稿件已被录用，将于不久后在网上公开发布。 /span /p /section /div