开机点火后总有一句#3004 power failure occurred,这句话每次开机点火都会出现。为什么？ 还有次点火一分钟不到就灭火，看error log中是 #3004 power failure occurred RF 48V power voltag is too low plasma was shut off (plasma RF monitor) plasma was shut off during analysis(vac) gate valve is closed due ti an error while in analysisi mode. 这些是什么意思，已经开机一个小时了，点火两次没成功。是不是和采集数据的最后模式为COOL MODE 有关？
zhckj发表:开机点火后总有一句#3004 power failure occurred,这句话每次开机点火都会出现。为什么？ 还有次点火一分钟不到就灭火，看error log中是 #3004 power failure occurred RF 48V power voltag is too low plasma was shut off (plasma RF monitor) plasma was shut off during analysis(vac) gate valve is closed due ti an error while in analysisi mode. 这些是什么意思，已经开机一个小时了，点火两次没成功。是不是和采集数据的最后模式为COOL MODE 有关？
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