【序号】:1 【作者】:Kang-Yul Bae Young-Soo Yang Bum-Ho Choi 【题名】:Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system 【期刊】: Journal of Engineering Manufacture 【年、卷、期、起止页码】:June 2013 vol. 227 no. 6 881-889 【全文链接】:http://pib.sagepub.com/content/227/6/881.refs