【序号】:1 【作者】:P J S Pereira1,2, M L Escrivão1, M R Teixeira1, M J P Maneira1 and Y Nunes1 【题名】:Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes 【期刊】:Plasma Sources Science and Technology 【年、卷、期、起止页码】:2014 Volume 23Number 6 【全文链接】:http://iopscience.iop.org/0963-0252/23/6/065031