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Mechanical properties of sputtered silicon nitride thin films
Journal of Applied Physics -- December 15, 2003 -- Volume 94, Issue 12, pp. 7868-7873
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第2楼2007/07/16
Young's modulus of silicon nitride used in scanning force microscope cantilevers
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醉卧古隆中
第3楼2007/07/16
Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc
Zhenghao Gan, Yuebin Zhang, Guoqing Yu, C. M. Tan, S. P. Lau, and B. K. Tay
Journal of Applied Physics -- April 1, 2004 -- Volume 95, Issue 7, pp. 3509-3515
JApplPhys95-3509