以前正常,今天跳闸后做样没有信号,在diagnose下除RF pass外全部都fail。检查发现capilary voltage加不上去,总显示4.5,在scan device时以下显示fail:(后面是显示数值)
capillary voltage 103.33
multipole 1 offset (v ) 103.38
multipole 2 offset (v ) 103.33
multipole lens (v ) 103.2
trap offset (v ) 103.3
tube gate (v) 101.29